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1

SPIE Proceedings [SPIE 17th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics - Liptovsky Jan, Slovakia (Monday 6 September 2010)] 17th Slovak-Czech-Polish Optical Conference on Wave and Quantum Aspects of Contemporary Optics - Nanometer scale imaging with table top extreme ultraviolet sources

Wachulak, Przemyslaw W., Sandberg, Richard L., Isoyan, Artak, Urbanski, Lukasz, Bartnik, Andrzej, Bartels, Randy A., Menoni, Carmen S., Fiedorowicz, Henryk, Rocca, Jorge J., Marconi, Mario C.

Année:

2010

Langue:

english

Fichier:

PDF, 33.72 MB

english, 2010

2

Characterization and optimization of the laser-produced plasma EUV source at 13.5 nm based on a double-stream Xe/He gas puff target

R. Rakowski, A. Bartnik, H. Fiedorowicz, F. de Gaufridy de Dortan, R. Jarocki, J. Kostecki, J. Mikołajczyk, L. Ryć, M. Szczurek, P. Wachulak

Journal:

Applied Physics B: Lasers and Optics

Année:

2010

Langue:

english

Fichier:

PDF, 3.81 MB

english, 2010

3

Holographic imaging with a nanometer resolution using compact table-top EUV laser

P. W. Wachulak, M. C. Marconi, R. A. Bartels, C. S. Menoni, J. J. Rocca

Journal:

Opto-Electronics Review

Année:

2010

Langue:

english

Fichier:

PDF, 7.23 MB

english, 2010

4

[IEEE 2010 23rd Annual Meeting of the IEEE Photonics Society (Formerly LEOS Annual Meeting) - Denver, CO, USA (2010.11.7-2010.11.11)] 2010 IEEE Photinic Society's 23rd Annual Meeting - Extreme ultraviolet lasers demonstrate new nano-patterning schemes

Marconi, M. C., Wachulak, P., Urbanski, L., Menoni, C.S, Rocca, J. J., Isoyan, A., Jiang, F., Cheng, Y., Cerrina, F.

Année:

2010

Langue:

english

Fichier:

PDF, 389 KB

english, 2010

5

[IEEE 2011 IEEE Photonics Conference (IPC) - Arlington, VA, USA (2011.10.9-2011.10.13)] IEEE Photonic Society 24th Annual Meeting - Scalable Talbot lithography with an extreme ultraviolet table top laser

Urbanski, L., Wachulak, P., Isoyan, A., Stein, A., Menoni, C.S., Rocca, J.J., Marconi, M.

Année:

2011

Langue:

english

Fichier:

PDF, 257 KB

english, 2011

6

New opportunities in interferometric lithography using extreme ultraviolet tabletop lasers

Wachulak, Przemyslaw W.

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2009

Langue:

english

Fichier:

PDF, 623 KB

english, 2009

7

Calibration of SiC Detectors for Nitrogen and Neon Plasma Emission Using Gas-Puff Target Sources

Torrisi, Alfio, Wachulak, Przemyslaw W., Bartnik, Andrzej, Fok, Tomasz, Wegrzynski, Lukasz, Fiedorowicz, Henryk, Mazzillo, Massimo, Sciuto, Antonella, Torrisi, Lorenzo

Journal:

IEEE Transactions on Electron Devices

Année:

2017

Langue:

english

Fichier:

PDF, 1.30 MB

english, 2017

8

EUV induced low temperature SF 6 -based plasma

Bartnik, A., Wachulak, P., Fiedorowicz, H., Skrzeczanowski, W., Jarocki, R., Fok, T., Węgrzyński, Ł.

Journal:

Journal of Instrumentation

Année:

2016

Langue:

english

Fichier:

PDF, 3.78 MB

english, 2016

9

Characterization and optimization of images acquired by a compact soft X-ray microscope based on a double stream gas-puff target source

Torrisi, A., Wachulak, P., Nawaz, M. Fahad, Bartnik, A., Węgrzyński, L., Jancarek, A., Fiedorowicz, H.

Journal:

Journal of Instrumentation

Année:

2016

Langue:

english

Fichier:

PDF, 1.94 MB

english, 2016

10

Table-top water-window soft X-ray microscope using a Z-pinching capillary discharge source

Nawaz, M.F., Nevrkla, M., Jancarek, A., Torrisi, A., Parkman, T., Turnova, J., Stolcova, L., Vrbova, M., Limpouch, J., Pina, L., Wachulak, P.

Journal:

Journal of Instrumentation

Année:

2016

Langue:

english

Fichier:

PDF, 4.31 MB

english, 2016

11

Characterization of Si and SiC detectors for laser-generated plasma monitoring in short wavelength range

Torrisi, A., Wachulak, P., Fiedorowicz, H., Torrisi, L.

Journal:

Journal of Instrumentation

Année:

2020

Fichier:

PDF, 3.21 MB

2020

12

Laser-produced plasma soft x-ray source based on an aerosol target

WÄgrzyÅski, Åukasz, Bartnik, Andrzej, Wachulak, PrzemysÅaw, Fok, Tomasz, Fiedorowicz, Henryk

Journal:

Physics of Plasmas

Année:

2020

Fichier:

PDF, 1.77 MB

2020

13

EUV induced, low temperature plasmas, produced in an aerosol target

Bartnik, A., WÄgrzyÅski, Å., Skrzeczanowski, W., Wachulak, P., Fiedorowicz, H.

Journal:

Journal of Instrumentation

Année:

2020

Fichier:

PDF, 1.02 MB

2020

14

Pulsed laser-plasma soft X-ray source as a compact tool for X-ray absorption spectroscopy of metal oxides

Fok, T., Wachulak, P. W., Janulewicz, K. A., WÄgrzyÅski, Å., Bartnik, A., Szlachetko, J., ZajÄc, M., Fiedorowicz, H.

Journal:

Journal of Instrumentation

Année:

2020

Fichier:

PDF, 1.33 MB

2020

15

Laser-plasma EUV source dedicated for surface processing of polymers

A. Bartnik, H. Fiedorowicz, R. Jarocki, J. Kostecki, M. Szczurek, P.W. Wachulak

Journal:

Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment

Année:

2011

Langue:

english

Fichier:

PDF, 1.17 MB

english, 2011

16

“Water window” compact, table-top laser plasma soft X-ray sources based on a gas puff target

P.W. Wachulak, A. Bartnik, H. Fiedorowicz, P. Rudawski, R. Jarocki, J. Kostecki, M. Szczurek

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Année:

2010

Langue:

english

Fichier:

PDF, 761 KB

english, 2010

17

Efficient micromachining of poly(vinylidene fluoride) using a laser-plasma EUV source

A. Bartnik, H. Fiedorowicz, R. Jarocki, J. Kostecki, M. Szczurek, P. W. Wachulak

Journal:

Applied Physics A: Materials Science & Processing

Année:

2012

Langue:

english

Fichier:

PDF, 287 KB

english, 2012

18

High-repetition-rate, intracavity-pumped KTP OPO at 1572

W. Żendzian, J.K. Jabczyński, P. Wachulak, J. Kwiatkowski

Journal:

Applied Physics B: Lasers and Optics

Année:

2005

Langue:

english

Fichier:

PDF, 567 KB

english, 2005

19

A compact, quasi-monochromatic laser-plasma EUV source based on a double-stream gas-puff target at 13.8 nm wavelength

P. W. Wachulak, A. Bartnik, H. Fiedorowicz, T. Feigl, R. Jarocki, J. Kostecki, R. Rakowski, P. Rudawski, M. Sawicka, M. Szczurek, A. Szczurek, Z. Zawadzki

Journal:

Applied Physics B: Lasers and Optics

Année:

2010

Langue:

english

Fichier:

PDF, 1.99 MB

english, 2010

20

Laser-produced plasma EUV source based on tin-rich, thin-layer

R. Rakowski, J. Mikołajczyk, A. Bartnik, H. Fiedorowicz, F. de Gaufridy de Dortan, R. Jarocki, J. Kostecki, M. Szczurek, P. Wachulak

Journal:

Applied Physics B: Lasers and Optics

Année:

2011

Langue:

english

Fichier:

PDF, 1.54 MB

english, 2011

21

Table top nanopatterning with extreme ultraviolet laser illumination

M.G. Capeluto, P. Wachulak, M.C. Marconi, D. Patel, C.S. Menoni, J.J. Rocca, C. Iemmi, E.H. Anderson, W. Chao, D.T. Attwood

Journal:

Microelectronic Engineering

Année:

2007

Langue:

english

Fichier:

PDF, 465 KB

english, 2007

22

Extreme ultraviolet lithography with table top lasers

M.C. Marconi, P.W. Wachulak

Journal:

Progress in Quantum Electronics

Année:

2010

Langue:

english

Fichier:

PDF, 1.53 MB

english, 2010

23

Nanopatterning in a compact setup using table top extreme ultraviolet lasers

P. W. Wachulak, M. G. Capeluto, C. S. Menoni, J. J. Rocca, M. C. Marconi

Journal:

Opto-Electronics Review

Année:

2008

Langue:

english

Fichier:

PDF, 937 KB

english, 2008

24

Aspects of nanometer scale imaging with extreme ultraviolet (EUV) laboratory sources

P. W. Wachulak, M. C. Marconi, A. Isoyan, L. Urbanski, A. Bartnik, H. Fiedorowicz, R. A. Bartels

Journal:

Opto-Electronics Review

Année:

2012

Langue:

english

Fichier:

PDF, 1.32 MB

english, 2012

25

Soft X-ray characterization of an elongated gas-puff target dedicated for laser–matter interaction experiments and high harmonic generation

P.W. Wachulak, A. Bartnik, H. Fiedorowicz, R. Jarocki, J. Kostecki, M. Szczurek

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Année:

2012

Langue:

english

Fichier:

PDF, 1010 KB

english, 2012

26

Demonstration of Nanomachining With Focused Extreme Ultraviolet Laser Beams

Bravo, H., Szapiro, B.T., Wachulak, P.W., Marconi, M.C., Weilun Chao, Anderson, E.H., Menoni, C.S., Rocca, J.J.

Journal:

IEEE Journal of Selected Topics in Quantum Electronics

Année:

2012

Langue:

english

Fichier:

PDF, 600 KB

english, 2012

27

Analysis of extreme ultraviolet microscopy images of patterned nanostructures based on a correlation method

Wachulak, P. W., Brewer, C. A., Brizuela, F., Menoni, C. S., Chao, W., Anderson, E. H., Bartels, R. A., Rocca, J. J., Marconi, M. C.

Journal:

Journal of the Optical Society of America B

Année:

2008

Langue:

english

Fichier:

PDF, 543 KB

english, 2008

28

Interferometric lithography with an amplitude division interferometer and a desktop extreme ultraviolet laser

Wachulak, P., Grisham, M., Heinbuch, S., Martz, D., Rockward, W., Hill, D., Rocca, J. J., Menoni, C. S., Anderson, E., Marconi, M.

Journal:

Journal of the Optical Society of America B

Année:

2008

Langue:

english

Fichier:

PDF, 280 KB

english, 2008

29

Soft x-ray laser holography with wavelength resolution

Wachulak, P. W., Marconi, M. C., Bartels, R. A., Menoni, C. S., Rocca, J. J.

Journal:

Journal of the Optical Society of America B

Année:

2008

Langue:

english

Fichier:

PDF, 372 KB

english, 2008

30

Sub 400 nm spatial resolution extreme ultraviolet holography with a table top laser

Wachulak, P. W., Bartels, R. A., Marconi, M. C., Menoni, C. S., Rocca, J. J., Lu, Y., Parkinson, B.

Journal:

Année:

2006

Langue:

english

Fichier:

PDF, 620 KB

english, 2006

31

Patterning of nano-scale arrays by table-top extreme ultraviolet laser interferometric lithography

Wachulak, P. W., Capeluto, M. G., Marconi, M. C., Menoni, C. S., Rocca, J. J.

Journal:

Année:

2007

Langue:

english

Fichier:

PDF, 795 KB

english, 2007

32

Volume extreme ultraviolet nano-holographic imaging with numerical optical sectioning

Wachulak, P. W., Marconi, M. C., Bartels, R. A., Menoni, C. S., Rocca, J. J.

Journal:

Année:

2007

Langue:

english

Fichier:

PDF, 287 KB

english, 2007

33

A 50nm spatial resolution EUV imaging–resolution dependence on object thickness and illumination bandwidth

Wachulak, Przemyslaw W., Bartnik, Andrzej, Fiedorowicz, Henryk, Kostecki, Jerzy

Journal:

Année:

2011

Langue:

english

Fichier:

PDF, 1.35 MB

english, 2011

34

Single-shot extreme ultraviolet laser imaging of nanostructures with wavelength resolution

Brewer, Courtney A., Brizuela, Fernando, Wachulak, Przemyslaw, Martz, Dale H., Chao, Weilun, Anderson, Erik H., Attwood, David T., Vinogradov, Alexander V., Artyukov, Igor A., Ponomareko, Alexander G.

Journal:

Année:

2008

Langue:

english

Fichier:

PDF, 326 KB

english, 2008

35

Microscopy of extreme ultraviolet lithography masks with 132 nm tabletop laser illumination

Brizuela, F., Wang, Y., Brewer, C. A., Pedaci, F., Chao, W., Anderson, E. H., Liu, Y., Goldberg, K. A., Naulleau, P., Wachulak, P.

Journal:

Année:

2009

Langue:

english

Fichier:

PDF, 299 KB

english, 2009

36

Sub-70 nm resolution tabletop microscopy at 138 nm using a compact laser–plasma EUV source

Wachulak, Przemyslaw W., Bartnik, Andrzej, Fiedorowicz, Henryk

Journal:

Année:

2010

Langue:

english

Fichier:

PDF, 216 KB

english, 2010

37

Numerical Optical Sectioning for 3D Holographic Images with EUV Lasers

Wachulak, P.W., Marconi, M.C., Bartels, R.A., Menoni, C.S., Rocca, J.J.

Journal:

Optics and Photonics News

Année:

2007

Langue:

english

Fichier:

PDF, 572 KB

english, 2007

38

Characterization of multi-jet gas puff targets for high-order harmonic generation using EUV shadowgraphy

P.W. Wachulak, A. Bartnik, R. Jarocki, H. Fiedorowicz

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Année:

2012

Langue:

english

Fichier:

PDF, 1008 KB

english, 2012

39

Simultaneous treatment of polymer surface by EUV radiation and ionized nitrogen

Bartnik, Andrzej, Lisowski, Wojciech, Sobczak, Janusz, Wachulak, Przemyslaw, Budner, Boguslaw, Korczyc, Barbara, Fiedorowicz, Henryk

Journal:

Applied Physics A: Materials Science & Processing

Année:

2012

Langue:

english

Fichier:

PDF, 397 KB

english, 2012

40

Imaging of nanostructures with sub-100

Wachulak, Przemyslaw W., Bartnik, Andrzej, Fiedorowicz, Henryk, Pánek, Dalibor, Brůža, Petr

Journal:

Applied Physics B: Lasers and Optics

Année:

2012

Langue:

english

Fichier:

PDF, 674 KB

english, 2012

41

Water-window microscopy using a compact, laser-plasma SXR source based on a double-stream gas-puff target

Przemyslaw W. Wachulak, Andrzej Bartnik, Marcin Skorupka…

Journal:

Applied Physics B: Lasers and Optics

Année:

2013

Langue:

english

Fichier:

PDF, 755 KB

english, 2013

42

Study of crystalline thin films and nanofibers by means of the laser–plasma EUV-source based microscopy

Wachulak, P.W., Bartnik, A., Baranowska-Korczyc, A., Pánek, D., Brůža, P., Kostecki, J., Węgrzyński, Ł., Jarocki, R., Szczurek, M., Fronc, K., Elbaum, D., Fiedorowicz, H.

Journal:

Radiation Physics and Chemistry

Année:

2013

Langue:

english

Fichier:

PDF, 1.10 MB

english, 2013

43

Sub 1-μm resolution “water-window” microscopy using a compact, laser-plasma SXR source based on a double stream gas-puff target

Wachulak, Przemyslaw W., Bartnik, Andrzej, Wegrzynski, Lukasz, Kostecki, Jerzy, Jarocki, Roman, Fok, Tomasz, Szczurek, Mirosław, Fiedorowicz, Henryk

Journal:

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Année:

2013

Langue:

english

Fichier:

PDF, 880 KB

english, 2013

44

Luminescence of He and Ne gases induced by EUV pulses from a laser plasma source

Bartnik, A., Wachulak, P., Fiedorowicz, H., Jarocki, R., Kostecki, J., Szczurek, M.

Journal:

Radiation Physics and Chemistry

Année:

2013

Langue:

english

Fichier:

PDF, 1.01 MB

english, 2013

45

Extreme ultraviolet tomography of multi-jet gas puff target for high-order harmonic generation

Wachulak, P. W., Węgrzyński, Ł., Zápražný, Z., Bartnik, A., Fok, T., Jarocki, R., Kostecki, J., Szczurek, M., Korytár, D., Fiedorowicz, H.

Journal:

Applied Physics B: Lasers and Optics

Année:

2014

Langue:

english

Fichier:

PDF, 3.47 MB

english, 2014

46

Extreme ultraviolet tomography using a compact laser–plasma source for 3D reconstruction of low density objects

Wachulak, Przemyslaw W., Węgrzyński, Łukasz, Zápražný, Zdenko, Bartnik, Andrzej, Fok, Tomasz, Jarocki, Roman, Kostecki, Jerzy, Szczurek, Miroslaw, Korytár, Dusan, Fiedorowicz, Henryk

Journal:

Année:

2014

Langue:

english

Fichier:

PDF, 556 KB

english, 2014

47

[IEEE 2014 International Conference Laser Optics - Saint Petersburg, Russia (2014.6.30-2014.7.4)] 2014 International Conference Laser Optics - Laser plasma sources of soft X-rays and extreme ultraviolet (EUV) for application in science and technology

Fiedorowicz, Henryk, Ul Ahad, Inam, Bartnik, Andrzej, Fok, Tomasz, Jarocki, Roman, Korczyc, Barbara, Kostecki, Jerzy, Szczurek, Anna, Szczurek, Miroslaw, Wachulak, Przemyslaw, Wegrzynski, Lukasz

Année:

2014

Langue:

english

Fichier:

PDF, 71 KB

english, 2014

48

[IEEE 2007 32nd IEEE/CPMT International Electronic Manufacturing Technology Symposium - San Jose, CA, USA (2007.10.3-2007.10.5)] 2007 32nd IEEE/CPMT International Electronic Manufacturing Technology Symposium - Compact Soft X-ray Lasers for Imaging, Material Processing, and Characterization at the Nanoscale

Rocca, J.J., Marconi, M.C., Menoni, C.S., Wachulak, P. W., Luther, B., Brizuela, F., Brewer, C., Wang, Y., Alessi, D., Berrill, M., Martz, D., Heinbuch, S., Grisham, M., Chao, W., Anderson, E. H., Att

Année:

2007

Langue:

english

Fichier:

PDF, 351 KB

english, 2007

49

High numerical aperture tabletop soft x-ray diffraction microscopy with 70-nm resolution

Sandberg, R. L., Song, C., Wachulak, P. W., Raymondson, D. A., Paul, A., Amirbekian, B., Lee, E., Sakdinawat, A. E., La-O-Vorakiat, C., Marconi, M. C., Menoni, C. S., Murnane, M. M., Rocca, J. J., Kap

Journal:

Proceedings of the National Academy of Sciences

Année:

2008

Langue:

english

Fichier:

PDF, 807 KB

english, 2008

50

[IEEE LEOS 2009 -22nd Annuall Meeting of the IEEE Lasers and Electro-Optics Society (LEO) - Belek-Antalya, Turkey (2009.10.4-2009.10.8)] 2009 IEEE LEOS Annual Meeting Conference Proceedings - Table top ultraviolet lasers enable new nano-patterning schemes

Marconi, M. C., Urbanski, L., Wachulak, P., Isoyan, A., Jiang, F., Cheng, Y., Rocca, J. J., Menoni, C. S., Cerrina, F.

Année:

2009

Langue:

english

Fichier:

PDF, 391 KB

english, 2009